Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
نویسندگان
چکیده
Fabrice F.C. Duval a,∗, Stephen A. Wilson a, Graham Ensell b, Nicolas M.P. Evanno c, Markys G. Cain d, Roger W. Whatmore a,1 a School of Industrial and Manufacturing Science, Cranfield University, Bedfordshire MK43 0AL, UK b INNOS Limited, Mountbatten Building, Highfield, Southampton, Hampshire SO17 1BJ, UK c Rolls-Royce Plc, Strategic Research Centre, Sina-28, P.O. Box 31, Derby DE24 8BJ, UK d National Physical Laboratory, Hampton Road, Teddington, Middlesex TW11 0LW, UK
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